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因靜電會減少產品優率,電磁干擾會中斷自動設備運行,靜電吸附會增加表面微粒收集的難度,因此對靜電的產生進行控制也是必要的。因為靜電電荷事實上會把污染物吸附在產品或工具表面,靜電吸附正變為潔凈室觀注的焦點。例如,將4英寸晶片充電至1KV時,對直徑為1微米的微粒的吸附力將達到830000英磅/平方英寸。因此,與重力、空氣動力和粘附力相比,帶電物體與微粒間的靜電吸附將更強。

 

Due to static electricity will reduce the product's excellent rate, the electromagnetic interference will interrupt automatic equipment operation, electrostatic adsorption will increase the difficulty of the surface particles collection, therefore the production of static electricity is necessary. Because of the fact that the electrostatic charge will be absorbed in the product or the surface of the tool, the electrostatic adsorption is becoming the focus of the clean room. For example, the 4 inch wafer charge to 1KV, the diameter of 1 micron particle adsorption capacity will reach 830000 pounds per square inch. Therefore, compared with the gravity, the air force and the adhesion force, the electrostatic adsorption between the charged object and the particle will be stronger.

 

在空氣凈化工程 http://www.jnjkjh.com/ 中的靜電危害主要表現在:

 

The main performance of electrostatic hazard in air purification project:

 

1.吸附灰塵。由于靜電吸附作用，潔凈室內空氣微粒吸附在電子元器件表面和墻壁表面，影響產品質量和潔凈度。靜電也成為潔凈室新的發塵源。

 

1 Adsorption of dust. Due to the electrostatic interaction, the clean indoor air particles adsorbed on the surface of the electronic components surface and wall, affecting product quality and cleanliness. Static electricity has become a new source of dust in the clean room.

 

2.誘發火災與爆炸。電子工業潔凈室中會大量使用易燃易爆氣體、液體和有機溶劑，靜電會成為這些氣（液）體和溶劑的引火源，引起火災或爆炸。

 

2 induced fire and explosion. Electronic industrial clean room will be a large number of the use of flammable and explosive gas, liquid and organic solvent, static electricity will become the gas (liquid) and solvent ignition source, causing a fire or explosion.

 

3.電暈放電，或火花放電，發出噪聲，干擾電子設備和電子元器件。

 

3 corona discharge, or spark discharge, the issue of noise, the interference of electronic equipment and electronic components.

 

4.產生靜電電場，使電子元器件短路、疲勞或破損。

 

4 to produce an electric field, so that the electronic components short circuit, fatigue or damage.